| 000 | 00774nam a2200229 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20240709031711.0 | ||
| 006 | a | ||
| 008 | 240709b |||||||| |||| 00| 0 eng d | ||
| 020 | _a0071432418 | ||
| 040 |
_aDWCL-Main lib. _cOC |
||
| 082 |
_2Fifth edition _aCirc. 621.38152 V217m 2004 |
||
| 100 | _aVan Zant, Peter | ||
| 245 | _aMicrochip fabrication : a practical guide to semiconductor processing / | ||
| 250 | _aFifth edition | ||
| 260 |
_aN. Y. : _bMcGraw-Hill, _cc2004. |
||
| 300 |
_axiii, _b642 p. : ill. ; _c23 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | _a1. Semiconductors-Design and construction. | ||
| 650 | _a2. Integrated circuits-Design and construction. | ||
| 942 |
_2ddc _n0 _cBK-CIRC _eFifth edition _kCirc. |
||
| 999 |
_c2137 _d2137 |
||