TY  - BOOK
AU  - Van Zant, Peter
TI  - Microchip fabrication : a practical guide to semiconductor processing
SN  - 0071432418
U1  - Circ. 621.38152 V217m 2004 Fifth edition
PY  - 2004///
CY  - N. Y. : 
PB  - McGraw-Hill, 
KW  - 1. Semiconductors-Design and construction.
KW  - 2. Integrated circuits-Design and construction
N1  - Includes bibliographical references and index
ER  -