Van Zant, Peter <br/><br/>
Microchip fabrication : a practical guide to semiconductor processing / 

 - Fifth edition 
 - N. Y. :   McGraw-Hill,   c2004. 
 - xiii,   642 p. : ill. ;   23 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0071432418 
<br/><br/><label>Subjects--Topical Terms: </label><br/>1. Semiconductors-Design and construction. <br/>2. Integrated circuits-Design and construction.
<br/><br/><label>Dewey Class. No.: </label>Circ. 621.38152 V217m 2004