Microchip fabrication : a practical guide to semiconductor processing /
Van Zant, Peter
Microchip fabrication : a practical guide to semiconductor processing / - Fifth edition - N. Y. : McGraw-Hill, c2004. - xiii, 642 p. : ill. ; 23 cm.
Includes bibliographical references and index.
0071432418
1. Semiconductors-Design and construction.
2. Integrated circuits-Design and construction.
Circ. 621.38152 V217m 2004
Microchip fabrication : a practical guide to semiconductor processing / - Fifth edition - N. Y. : McGraw-Hill, c2004. - xiii, 642 p. : ill. ; 23 cm.
Includes bibliographical references and index.
0071432418
1. Semiconductors-Design and construction.
2. Integrated circuits-Design and construction.
Circ. 621.38152 V217m 2004